Preparation and Characterization of Mixed Metal Oxide Layers using Reactive Combinatorial Sputtering

Abstract

Combinatorial DC sputtering method of metal oxides is presented onto a 30x30cm substrate. Specifically tungsten a molybdenum oxides were deposited and characterized for electrochromic and sensoric purposes. Mapping ellipsometry combined with RBS proves the presence of the continuous composition range in the layers. Samples of amorphous character were tested for electrochromic properties in organic electrolyte. Combinatorial deposition of non-stoichiometric suboxides for VOC gas sensing also presented.