Preparation and Characterization of Mixed Metal Oxide Layers using Reactive Combinatorial Sputtering

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URI
http://hdl.handle.net/20.500.14044/40886
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Abstract
Combinatorial DC sputtering method of metal oxides is presented onto a 30x30cm substrate. Specifically tungsten a molybdenum oxides were deposited and characterized for electrochromic and sensoric purposes. Mapping ellipsometry combined with RBS proves the presence of the continuous composition range in the layers. Samples of amorphous character were tested for electrochromic properties in organic electrolyte. Combinatorial deposition of non-stoichiometric suboxides for VOC gas sensing also presented.
Title
Preparation and Characterization of Mixed Metal Oxide Layers using Reactive Combinatorial Sputtering
xmlui.dri2xhtml.METS-1.0.item-description-titlenumber
7.
Author
Labadi, Z.
Petrik, P.
Georghe, M.
Moldovan, C.
Fried, M.
xmlui.dri2xhtml.METS-1.0.item-contributor-editor
Fried, Miklós
xmlui.dri2xhtml.METS-1.0.item-date-issued
2020
xmlui.dri2xhtml.METS-1.0.item-rights-access
Open access
xmlui.dri2xhtml.METS-1.0.item-other-conferenceTitle
Anyagtudományi Szimpózium
xmlui.dri2xhtml.METS-1.0.item-other-conferenceDate
2020. Szeptember 23-25.
xmlui.dri2xhtml.METS-1.0.item-language
en
xmlui.dri2xhtml.METS-1.0.item-format-page
3 p.
xmlui.dri2xhtml.METS-1.0.item-subject-oszkar
sputtering, electrochromism, gas sensors
xmlui.dri2xhtml.METS-1.0.item-description-version
Kiadói változat
xmlui.dri2xhtml.METS-1.0.item-other-containerTitle
Anyagtudományi Szimpózium (Symposium on Materials Science)
xmlui.dri2xhtml.METS-1.0.item-other-containerPeriodicalYear
2020
xmlui.dri2xhtml.METS-1.0.item-other-containerIdentifierIsbn
978-963-449-236-8
xmlui.dri2xhtml.METS-1.0.item-type-type
Konferenciaközlemény
xmlui.dri2xhtml.METS-1.0.item-subject-area
Műszaki tudományok - anyagtudományok és technológiák
xmlui.dri2xhtml.METS-1.0.item-publisher-university
Óbudai Egyetem
xmlui.dri2xhtml.METS-1.0.item-publisher-faculty
Kandó Kálmán Villamosmérnöki Kar