Numerical Ellipsometry Analysis (NEA) of Nanoscale Gold Gratings

Abstract

This study presents a comprehensive numerical ellipsometry analysis of gold nanograting by integrating an advanced simulation platform, COMSOL Multiphysics. The proposed hybrid approach enables detailed investigation of the optical properties and polarization-dependent responses of plasmonic nanostructures. Simulations were conducted for various incident angles (Φ = 60°, 65°, 70°, and 75°) and grating periods (CD = 70 and 110 nm) to evaluate the influence of structural parameters on the ellipsometry spectra. The simulated results show a good agreement with experimental ellipsometry measurements obtained from fabricated nanograting, leaving room for further improvement of the combined method. This work demonstrates that the integration of numerical ellipsometry modeling with finite-element and finite-element–frequency-domain solvers provide a powerful and efficient tool for the design and optimization of highsensitivity optical and plasmonic sensors.